Generation Activity and Structural Defects in Near-Surface Silicon Layers

Author： Davydov V. N.   Belyaev S. V.   Popov V. V.   Rybchenkov A. A.   Moseychuk A. G.  

Publisher： Springer Publishing Company

ISSN： 1064-8887

Source： Russian Physics Journal, Vol.46, Iss.11, 2003-11, pp. : 1144-1150

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