Removal of Carbon Contamination on Si Wafers with an Excimer Lamp

Author： TODE MAYUMI   TAKIGAWA YASUO   IGUCHI TAIZO   MATSUURA HIDEHARU   OHMUKAI MASATO   SASAKI WATARU  

Publisher： Springer Publishing Company

ISSN： 1543-1940

Source： Metallurgical and Materials Transactions A, Vol.38, Iss.3, 2007-03, pp. : 596-598

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