Effects of lithography non-uniformity on device electrical behavior. Simple stochastic modeling of material and process effects on device performance

Author： Patsis George Constantoudis Vassilios Gogolides Evangelos

Publisher： Springer Publishing Company

ISSN： 1569-8025

Source： Journal of Computational Electronics, Vol.5, Iss.4, 2006-12, pp. : 341-344

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