Fabrication of BAW Resonators Based on Piezoelectric AlN and Reflector-on-Membrane Structure

Author: Altamura Davide   Pomarico Anna   Epifani Gianmichele   Ingrosso Ilaria   Todaro Maria Teresa   Tasco Vittorianna   De Vittorio Massimo   Passaseo Adriana  

Publisher: Taylor & Francis Ltd

ISSN: 0015-0193

Source: Ferroelectrics, Vol.389, Iss.1, 2009-01, pp. : 32-40

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