Structural and Piezoelectric Properties of DC-Sputtered AlN Films Deposited on Different Si-Based Substrates

Author： Ingrosso I. Tasco V. Altamura D. De Vittorio M. Passaseo A.

ISSN： 0015-0193

Source： Ferroelectrics, Vol.389, Iss.1, 2009-01, pp. : 41-48

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