Features of sputtering of nitrides and their components

Author: Mosunov A. S.   Ryzhov YU. A.   Shkarban I. I.   Yurasova V. E.   Zykova† E. YU.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.162, Iss.6, 2007-06, pp. : 401-413

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Abstract