Effects of annealing on the structural and surface properties of buried silicon oxide layers synthesized by the SIMOX process

Author： Patel A. P.   Yadav A. D.   Dubey S. K.   Panigrahi B. K.   Nair K. G.M.   Kothari D. C.  

Publisher： Taylor & Francis Ltd

ISSN： 1042-0150

Source： Radiation Effects and Defects in Solids, Vol.166, Iss.8-9, 2011-09, pp. : 734-738

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