Investigation of structure and composition of buried oxide layers formed by oxygen-ion implantation into silicon

Author： Patel A. P. Yadav A. D. Dubey S. K. Panigrahi B. K. Nair K. G. M.

ISSN： 1042-0150

Source： Radiation Effects and Defects in Solids, Vol.164, Iss.1, 2009-01, pp. : 49-58

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