Fabrication of Pb(Zr,Ti)O3 Thin Films by Liquid Delivery MOCVD Using a Cocktail Source with Pb(METHD)2, Zr(METHD)4 and Ti(MPD)(METHD)2

By Otani Yohei   Abe Norikazu   Ueda Yoshiki   Miyake Masato   Okamura Soichiro   Shiosaki Tadashi  

Integrated Ferroelectrics, Vol. 46, Iss. 1, 2002-01 ,pp. : 115-124

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Influence of Reactor Pressure on the Formation of PZT Thin Films by Liquid Delivery MOCVD

By Ueda Yoshiki   Abe Norikazu   Otani Yohei   Miyake Masato   Okamura Soichiro   Shiosaki Tadashi  

Integrated Ferroelectrics, Vol. 46, Iss. 1, 2002-01 ,pp. : 125-131

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STRONTIUM BISMUTH TANTALATE THIN FILM DEPOSITION BY LIQUID-DELIVERY MOCVD USING NOVEL LIQUID BISMUTH PRECURSORS

By SILINSKAS M.   LISKER M.   MATICHYN S.   BURTE E.   HEMPEL T.   HYEON J.   LORENZ V.   EDELMANNN F.  

Integrated Ferroelectrics, Vol. 79, Iss. 1, 2006-11 ,pp. : 195-202

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LOW TEMPERATURE DEPOSITION OF Pb(Zr,Ti)O 3 THIN FILMS BY LIQUID DELIVERY MOCVD USING A COCKTAIL SOURCE WITH Pb(DMAMP) 2 , Zr(MMP) 4 AND Ti(MMP) 4

By OTANI YOHEI   UCHIYAMA KIYOSHI   OKAMURA SOICHIRO   SHIOSAKI TADASHI  

Integrated Ferroelectrics, Vol. 81, Iss. 1, 2006-11 ,pp. : 261-270

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LOW TEMPERATURE PREPARATION OF (Bi,Nd) 4 TI 3 O 12 THIN FILMS BY LIQUID-DELIVERY MOCVD USING NEODYMIUM PRECURSORS WITH HIGH DEPOSITION EFFICIENCY

By TASAKI Y.   SEKITA Y.   TANAKA T.   YODA K.   NITTAMACHI T.   YOSHIZAWA S.  

Integrated Ferroelectrics, Vol. 81, Iss. 1, 2006-11 ,pp. : 271-279

Taylor & Francis Ltd

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