Research on Laser Trimming of Silicon MEMS Vibratory Gyroscopes

Author： Zhao Xiaoguang   Zhou Bin   Zhang Rong   Chen Zhiyong  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.129, Iss.1, 2011-01, pp. : 37-44

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