Piezoelectric Thin Films: A Technology Platform for Innovative Devices

Author： Klee M.   Mauczok R.   Heesch C. Van   op het Veld B.   De Wild M.   Boots H.   Kumar B.   Soer W.   Schmitz G.   Mleczko M.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.134, Iss.1, 2012-01, pp. : 25-36

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