An Effective Interlayer Dielectric and Passivation Scheme Using Reactively Sputtered AL2O3 for (Ba,Sr)TiO3 Capacitors

Author： Kassam A.   Koutsaroff I.   Mcneil L.   Obeng J.   Woo P.   Zelner M.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.47, Iss.1, 2002-01, pp. : 259-264

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