Oxygen Diffusion Barriers for High-Density FeRAMs

Author: Moon B. K.   Pinnow C. U.   Imai K.   Arisumi O.   Itokawa H.   Hornik K.   Tsutsumi K.   Hilliger A.   Kunishima I.   Nagel N.   Yamakawa K.   Beitel G.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.47, Iss.1, 2002-01, pp. : 79-88

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