Novel PZT Capacitor Technology for 32Mb and Beyond FRAM Device Using PbTiO3 Seeding Layer

Author: Lee K. M.   Park K. S.   Nam S. D.   Lee S. W.   Joo S. H.   Seo J. S.   Kim Y. D.   Cho S. L.   Son Y. H.   An H. G.   Kim H. J.   Chung Y. J.   Heo J. E.   Lee M. S.   Park S. O.   Chung U. I.   Moon J. T.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 171-180

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