High Performance PST Thin Films on Polysilicon Sacrificial Layers for Uncooled IR Detectors

Author： Anthony Carl J.   Todd Mike A.   Donohue Paul P.   Harper Mark A. C.   Huang Zhaorong   Jones Jason C.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.49, Iss.1, 2002-01, pp. : 233-243

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