In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films

Author： Gu Yi-Fan   Zhou Zai-Fa   Sun Chao   Li Wei-Hua   Huang Qing-An  

Publisher： MDPI

E-ISSN： 2072-666x|7|10|174-174

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.10, 2016-10, pp. : 174-174

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