Etching Characteristics of Silica-Based Optical Waveguide for Planar Lightwave Circuit

Author： Kao Chien-Kang   Yang Zhi-Sheng   Tsai Chuen-Horng   Lin I-Nan   Chi Cheng-Chung  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.50, Iss.1, 2002-01, pp. : 241-249

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