Harmonic Analysis of Microbeams with PZT On-Chip Actuating and Sensing

Author： ZHOU JIA   BAUM MARIO   SCHMIEDEL RALF   GESSNER THOMAS   HUANG YIPING   RUAN GANG  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.63, Iss.1, 2004-01, pp. : 9-13

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