STUDY ON ELECTRICAL PROPERTIES OF FLATTENED MOCVD PZT FILM BY CMP PROCESS

Author： CHOI S.   BAE B.   SON Y.   LIM J.   YOO D.   IM D.   HEO J.   NAM S.   PARK J.   HONG C.   CHO H.   MOON J.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.75, Iss.1, 2005-10, pp. : 215-223

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

FABRICATION AND ELECTRICAL PROPERTIES OF PZT-PVDF 0-3 TYPE COMPOSITE FILM

By Son Y. H.   Kweon S. Y.   Kim S. J.   Kim Y. M.   Hong T. W.   Lee Y. G.  

Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. : 44-50

Taylor & Francis Ltd

Access to resources Recommend Favorite

Electrical and Structural Properities of PZT Films Deposited by MOCVD Using Ultrasonic Nebulization

By Lee Choon-Ho   Yeom Jung-Hoon  

Integrated Ferroelectrics, Vol. 47, Iss. 1, 2002-01 ,pp. : 167-176

Taylor & Francis Ltd

Access to resources Recommend Favorite

FABRICATION AND PROPERTIES OF METAL-PZT-METAL CAPACITORS BY LIQUID DELIVERY MOCVD

By XIE DAN   LI RUI   HAN XUEGUANG   RUAN YONG   REN TIAN   LIU LI  

Integrated Ferroelectrics, Vol. 100, Iss. 1, 2008-01 ,pp. : 114-122

Taylor & Francis Ltd

Access to resources Recommend Favorite

IMPRINT PROPERTIES OF YTTRIUM DOPED PZT THIN FILM

By CHENG W.   DING A.   QIU PINGSUN   HE XIYUN   ZHENG XINSEN  

Integrated Ferroelectrics, Vol. 75, Iss. 1, 2005-10 ,pp. : 173-179

Taylor & Francis Ltd

Access to resources Recommend Favorite

EFFECTS OF DEPOSITION PARAMETERS AND FILM THICKNESS ON THE PHASES AND ELECTRICAL PROPERTIES OF Pb(Mg1/3Nb2/3)O3 THIN FILMS MADE BY MOCVD USING ULTRASONIC NEBULIZATION

By Lee Choon-Ho   Kim Kwang-Pyo  

Integrated Ferroelectrics, Vol. 88, Iss. 1, 2007-02 ,pp. : 68-75

Taylor & Francis Ltd

Access to resources Recommend Favorite