INFLUENCE OF DEPOSITION TEMPERATURE AND N2 FLOW RATE ON HIGH QUALITY ZNO THIN FILM DEPOSITED ON SiO2/SI SUBSTRATE BY ULTRASONIC SPRAY PYROLYSIS

Author： Wen Yuan Yang Chengtao Jiang Songtao Zhang Shuren

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.95, Iss.1, 2007-12, pp. : 66-73

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