CHEMICAL VAPOR DEPOSITION OF ZrxHf1-xO2 THIN FILMS USING ANHYDROUS MIXED-METAL NITRATES PRECURSORS

Author: Zhang Wen-Qi   Huang Liu-Ying   Li Ai-Dong   Shao Qi-Yue   Wu Di  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.97, Iss.1, 2008-01, pp. : 93-102

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Abstract