COMPARATIVE ANALYSIS FOR THE LOCAL PIEZOELECTRIC PROPERTIES OF ION BEAM AND REACTIVE ION BEAM ETCHED Pb(Zr,Ti)O3 THIN FILMS

Author: Blach-Legrand C.   Saitzek S.   Da Costa A.   Desfeux R.   Soyer C.   Remiens D.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.98, Iss.1, 2008-01, pp. : 230-240

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