Study of Thin Polymeric Film Deposited by the PECVD Process for use at 193 nm

Author: Cazeca Mario   Nagarajan Ramaswamy   Sheu Min-Shyan   Gow Max   Comptois Cecil   Sabnis Ram   Farnsworth Ashley  

Publisher: Taylor & Francis Ltd

ISSN: 1060-1325

Source: Journal of Macromolecular Science, Part A: Pure and Applied Chemistry, Vol.44, Iss.12, 2007-12, pp. : 1317-1322

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Abstract