Lithography using nano-lens arrays made of light

Author: Sandoghdar V.   Drodofsky U.   Schulze Th.   Brezger B.   Drewsen M.   Pfau T.   Mlynek J.  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3044

Source: Journal of Modern Optics, Vol.44, Iss.10, 1997-10, pp. : 1883-1898

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Abstract