Impact of hydrogen dilution on optical properties of intrinsic hydrogenated amorphous silicon films prepared by high density plasma chemical vapor deposition for solar cell applications

Author： Chen Huai-Yi   Lee Yao-Jen   Chang Chien-Pin   Koo Horng-Show   Lai Chiung-Hui  

Publisher： Taylor & Francis Ltd

ISSN： 1362-3044

Source： Journal of Modern Optics, Vol.60, Iss.2, 2013-01, pp. : 145-151

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