Integrated Spin-on Barrier Layers a Reasonable Idea?

Author: Memesa Mine   Cheng Yajun   Perlich Jan   Müller-Buschbaum Peter   Gutmann Jochen S.  

Publisher: Taylor & Francis Ltd

ISSN: 1553-3174

Source: Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry, Vol.37, Iss.5, 2007-06, pp. : 315-320

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