Fabrication and Simulation of Shell Diamond Thin Film

Author： Li Duosheng Zuo Dunwen Zhou Xianliang Hua Xiaozhen

ISSN： 1553-3174

Source： Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry, Vol.41, Iss.3, 2011-03, pp. : 245-249

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Abstract

Shell diamond film prepared using DC plasma jet CVD (DCPJCVD) is characterized by those techniques. The relationships between morphology, microstructure, and film quality are investigated by scanning electron microscopy, X-ray diffraction, and Raman spectroscopy, respectively. The results show that, after molybdenum substrate was polished by series of diamond powder, atom hydrogen etching, a much higher nucleation density can be achieved. Synthetic diamond film is compact, continuous and uniform, and diamond film grows with the columnar spreading from the nucleation surface to the growth surface. (111) Faces were dominant in polycrystalline texture diamond film. Raman spectrum indicates that there is only diamond characteristic peak in diamond film; furthermore, the velocity, pressure, and temperature fields of reaction chamber were simulated by finite element methods respectively, which is help to prepare high quality shell diamond film. It also showed that, though uneven velocity and pressure fields' distributions have negative influence on the growth of diamond film, the temperature field is uniform, which guarantees to grow normally diamond film, and it accords with the experience results.