Polarization charge properties of low-temperature atomic layer deposition of AlN on GaN

Author: Voon K J   Bothe K M   Motamedi P   Cadien K C   Barlage D W  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.47, Iss.34, 2014-08, pp. : 345104-345108

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