Author: Ichikawa Akihiko Sakuma Shinya Sugita Masakuni Shoda Tatsuro Tamakoshi Takahiro Akagi Satoshi Arai Fumihito
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95004-95011
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