A detailed investigation and explanation of the appearance of different undercut profiles in KOH and TMAH

Author: Pal P   Haldar S   Singh S S   Ashok A   Yan X   Sato K  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.9, 2014-09, pp. : 95026-95033

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