Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces

Author： Dhelika Radon Sawai Kenji Takahashi Kunio Takarada Wataru Kikutani Takeshi Saito Shigeki

ISSN： 0964-1726

Source： Smart Materials and Structures, Vol.22, Iss.9, 2013-09, pp. : 95010-95018

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