Piezoelectric transduction of flexural modes in pre-stressed microbeam resonators

Author: Torri G B   Janssen N M A   Zeng Z   Rottenberg X   Karabacak D M   Vandecasteele M   Van Hoof C   Puers R   Tilmans H A C  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 85014-85028

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