Author: Torri G B Janssen N M A Zeng Z Rottenberg X Karabacak D M Vandecasteele M Van Hoof C Puers R Tilmans H A C
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 85014-85028
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