Author: Bourrier David Charlot Samuel Valdez-Nava Zarel Bley Vincent Combettes Céline Lopez Thomas Laur Jean-Pierre Brunet Magali
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 104003-104012
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