Hot switching damage mechanisms in MEMS contacts—evidence and understanding

Author: Basu Anirban   Hennessy Ryan P   Adams George G   McGruer Nicol E  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 105004-105019

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next