High-precision control of piezoelectric nanopositioning stages using hysteresis compensator and disturbance observer

Author： Gu Guo-Ying   Zhu Li-Min   Su Chun-Yi  

Publisher： IOP Publishing

ISSN： 0964-1726

Source： Smart Materials and Structures, Vol.23, Iss.10, 2014-10, pp. : 105007-105016

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