Chemical mechanical planarization of Ge2Sb2Te5 using IC1010 and Politex reg pads in acidic slurry

Author: Ao-Dong He   Bo Liu   Zhi-Tang Song   Liang-Yong Wang   Wei-Li Liu   Gao-Ming Feng   Song-Lin Feng  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.8, 2014-08, pp. : 88502-88507

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