Accounting for PDMS shrinkage when replicating structures

Author: Madsen Morten Hannibal   Feidenhans’l Nikolaj A   Hansen Poul-Erik   Garnæs Jørgen   Dirscherl Kai  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 127002-127007

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