Author: Madsen Morten Hannibal Feidenhans’l Nikolaj A Hansen Poul-Erik Garnæs Jørgen Dirscherl Kai
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.12, 2014-12, pp. : 127002-127007
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