Design and testing of a four-probe optical sensor head for three-axis surface encoder with a mosaic scale grating

Author： Shimizu Yuki   Ito Takeshi   Li Xinghui   Kim WooJae   Gao Wei  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94002-94016

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