Drift reduction in a scanning electrostatic force microscope for surface profile measurement

Author： Jia Zhigang   Ito So   Goto Shigeaki   Hosobuchi Keiichiro   Shimizu Yuki   Gao Wei  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94001-94009

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