An analogue contact probe using a compact 3D optical sensor for micro/nano coordinate measuring machines

Author： Li Rui-Jun   Fan Kuang-Chao   Miao Jin-Wei   Huang Qiang-Xian   Tao Sheng   Gong Er-min  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94008-94016

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