In-situ volumetric topography of IC chips for defect detection using infrared confocal measurement with active structured light

Author： Chen Liang-Chia   Le Manh-Trung   Lin Shyh-Tsong    

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94013-94020

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