Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.518, Iss.1, 2014-06, pp. : 68-73
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Characterization of H2O- inductively coupled plasma for dry etching
Journal of Physics: Conference Series , Vol. 100, Iss. 6, 2008-03 ,pp. :
By Van Laer K. Tinck S. Samara V. de Marneffe J.F. Bogaerts A.
Plasma Sources Science and Technology, Vol. 22, Iss. 2, 2013-04 ,pp. :
ON THE SURFACE CONTRIBUTION TO THE LINE PROFILE OF SMALL PARTICLES OF GOETHITE
Le Journal de Physique Colloques, Vol. 37, Iss. C6, 1976-12 ,pp. :