Microwave electron cyclotron resonance plasma metal organic chemical vapour deposition of Y2O3 coatings

Publisher: IOP Publishing

ISSN: 1742-6596

Source: Journal of Physics: Conference Series , Vol.114, Iss.1, 2008-05, pp. : 280-286

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract