XPS characterization of thin (Al2O3)x(TiO2)1-x films deposited on silicon
Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.113, Iss.1, 2008-05, pp. : 156-159
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Abstract
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Electrical properties of (Al2O3)x(TiO2)1-x films deposited on a silicon substrate
Journal of Physics: Conference Series , Vol. 113, Iss. 1, 2008-05 ,pp. :