Deposition of Pt inside fuel cell electrodes using high power impulse magnetron sputtering

By Cuynet S   Caillard A   Lecas T   Bigarré J   Buvat P   Brault P  

Journal of Physics D: Applied Physics, Vol. 47, Iss. 27, 2014-07 ,pp. : 272001-272005

IOP Publishing

Access to resources Recommend Favorite

AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering for SAW applications

By Aissa K Ait   Achour A   Elmazria O   Simon Q   Elhosni M   Boulet P   Robert S   Djouadi M A  

Journal of Physics D: Applied Physics, Vol. 48, Iss. 14, 2015-04 ,pp. : 145307-145312

IOP Publishing

Access to resources Recommend Favorite

Synthesis of $\alpha$-Al$_2$O$_3$ thin films using reactive high-power impulse magnetron sputtering

By  

EPL (EUROPHYSICS LETTERS), Vol. 82, Iss. 3, 2008-05 ,pp. : 36002-36002

Edp Sciences

Access to resources Recommend Favorite

On reactive high power impulse magnetron sputtering

By Gudmundsson J T  

Plasma Physics and Controlled Fusion, Vol. 58, Iss. 1, 2016-01 ,pp. : 14002-14009

IOP Publishing

Access to resources Recommend Favorite

Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO _x film growth

By Franz Robert   Clavero César   Kolbeck Jonathan   Anders André  

Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 15022-15032

IOP Publishing

Access to resources Recommend Favorite