Synthesis of $\alpha$-Al$_2$O$_3$ thin films using reactive high-power impulse magnetron sputtering

Publisher: Edp Sciences

E-ISSN: 1286-4854|82|3|36002-36002

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.82, Iss.3, 2008-05, pp. : 36002-36002

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