Fabrication of microstructure array directly on β-phase poly(vinylidene fluoride) thin film by O2 reactive ion etching

Author: Matsui G   Kanda M   Tsuchitani S   Miki Hirofumi  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|3|35026-35033

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.3, 2015-03, pp. : 35026-35033

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract