Large area high-speed metrology SPM system

Author： Klapetek P   Valtr M   Picco L   Payton O D   Martinek J   Yacoot A   Miles M  

Publisher： IOP Publishing

E-ISSN： 1361-6528|26|6|65501-65509

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.6, 2015-02, pp. : 65501-65509

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