Influence of the Window Thermal Diffusivity on the Silicon Wafer Temperature in a Rapid Thermal System

Author： Logerais Pierre-Olivier Khelalfa Raouf Riou Olivier Durastanti Jean-Félix Bouteville Anne

E-ISSN： 0145-7632|36|13|1111-1121

ISSN： 1521-0537

Source： Heat Transfer Engineering, Vol.36, Iss.13, 2015-09, pp. : 1111-1121

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