Change Spectrum Characteristics Modification of Films Deposited by Magnetron Sputtering with the Assistance of Argon Ions Beam

Publisher： IOP Publishing

E-ISSN： 1757-899X|81|1|11-15

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.81, Iss.1, 2015-04, pp. : 11-15

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